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Electronic grade hydrofluoric acid (EL grade) |
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Item |
Details |
EL grade (49%) |
unit |
value s |
hydrofluosilicic acid(H2SiF6) |
ppm |
≤100 |
chloride(Cl) |
ppm |
≤5 |
nitrate(NO3) |
ppm |
≤3 |
phosphate(PO4) |
ppm |
≤1 |
sulphate and sulphite(SO4) |
ppm |
≤5 |
Li |
ppb |
<20 |
Na |
ppb |
<100 |
Mg |
ppb |
<100 |
Al |
ppb |
<100 |
K |
ppb |
<100 |
Ca |
ppb |
<100 |
Cr |
ppb |
<20 |
Mn |
ppb |
<20 |
Fe |
ppb |
<100 |
Co |
ppb |
<20 |
Ni |
ppb |
<50 |
Cu |
ppb |
<20 |
Zn |
ppb |
<50 |
Ga |
ppb |
<20 |
Mo |
ppb |
<100 |
Ag |
ppb |
<20 |
Cd |
ppb |
<50 |
Sn |
ppb |
<20 |
Ba |
ppb |
<100 |
Pt |
ppb |
<100 |
Au |
ppb |
<20 |
Tl |
ppb |
<10 |
Pb |
ppb |
<50 |
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