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Electronic grade hydrofluoric acid(UP grade) |
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Item |
Details |
UP grade(49%) |
uint |
UP grade index |
Color |
Hazen |
<10 |
granules(≥0.5μm) |
Ea/ml |
≤25 |
granules(≥0.3μm) |
Ea/ml |
≤150 |
granules(≥0.2μm) |
Ea/ml |
≤300 |
hydrofluorosilicic acid(H2SiF6) |
ppm |
≤100 |
chloride(Cl) |
ppm |
≤5 |
nitrate(NO3) |
ppm |
≤3 |
phosphate(PO4) |
ppm |
≤1 |
sulphate and sulphite(SO4) |
ppm |
≤5 |
Li |
ppb |
<10 |
Be |
ppb |
<10 |
Na |
ppb |
<10 |
Mg |
ppb |
<10 |
Al |
ppb |
<10 |
K |
ppb |
<10 |
Ca |
ppb |
<10 |
V |
ppb |
<10 |
Cr |
ppb |
<10 |
Mn |
ppb |
<10 |
Fe |
ppb |
<10 |
Co |
ppb |
<10 |
Ni |
ppb |
<10 |
Cu |
ppb |
<10 |
Zn |
ppb |
<10 |
Ga |
ppb |
<10 |
Ge |
ppb |
<10 |
Zr |
ppb |
<10 |
Nb |
ppb |
<10 |
Mo |
ppb |
<10 |
Ag |
ppb |
<10 |
Cd |
ppb |
<10 |
Sn |
ppb |
<10 |
Sb |
ppb |
<10 |
Ba |
ppb |
<10 |
Ta |
ppb |
<10 |
Pt |
ppb |
<10 |
Au |
ppb |
<10 |
Tl |
ppb |
<10 |
Pb |
ppb |
<10 |
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