| |
|
|
|
 |
Electronic grade hydrofluoric acid UP-S grade |
|
| |
Item |
Details |
UP-S grade |
unit |
UP-S grade(49%) |
Color |
Hazen |
<10 |
granules(≥0.5μm) |
Ea/ml |
≤10 |
granules(≥0.3μm) |
Ea/ml |
≤50 |
granules(≥0.2μm) |
Ea/ml |
≤100 |
hydrofluorosilicic acid(H2SiF6) |
ppm |
≤100 |
chloride(Cl) |
ppm |
≤5 |
nitrate(NO3) |
ppm |
≤3 |
phosphate(PO4) |
ppm |
≤1 |
sulphate and sulphite(SO4)(SO4) |
ppm |
≤5 |
Li |
ppb |
<1 |
Be |
ppb |
<1 |
Na |
ppb |
<1 |
Mg |
ppb |
<1 |
Al |
ppb |
<1 |
K |
ppb |
<1 |
Ca |
ppb |
<1 |
V |
ppb |
<1 |
Cr |
ppb |
<1 |
Mn |
ppb |
<1 |
Fe |
ppb |
<1 |
Co |
ppb |
<1 |
Ni |
ppb |
<1 |
Cu |
ppb |
<1 |
Zn |
ppb |
<1 |
Ga |
ppb |
<1 |
Ge |
ppb |
<1 |
Zr |
ppb |
<1 |
Nb |
ppb |
<1 |
Mo |
ppb |
<1 |
Ag |
ppb |
<1 |
Cd |
ppb |
<1 |
Sn |
ppb |
<1 |
Sb |
ppb |
<1 |
Ba |
ppb |
<1 |
Ta |
ppb |
<1 |
Pt |
ppb |
<1 |
Au |
ppb |
<1 |
Tl |
ppb |
<1 |
Pb |
ppb |
<1 |
|
|
|
|